MKS 153D-26353 is a Type 153D Smart Exhaust Throttle Valve designed for semiconductor manufacturing and vacuum process equipment applications. It is used to precisely control vacuum exhaust flow and chamber pressure by adjusting the conductance between the process chamber and vacuum pumping system.
The 153D series throttle valve provides automated positioning control for vacuum systems and is commonly integrated into semiconductor processing equipment, thin-film deposition systems, etching systems, and other high-vacuum applications requiring accurate pressure regulation.
Product Parameters
| Parameter |
Description |
| Brand |
MKS Instruments |
| Model |
153D-26353 |
| Series |
Type 153D Smart Throttle Valve Series |
| Product Name |
Smart Exhaust Throttle Valve |
| Origin / Place of Origin |
USA |
| Product Status |
New Surplus / Original New |
| Valve Type |
Automatic Vacuum Throttle Valve |
| Application |
Semiconductor Vacuum Process Equipment |
| Function |
Vacuum exhaust flow control and chamber pressure regulation |
| Control Type |
Motorized automatic position control |
| Valve Size |
Approx. 2 inch throttle valve configuration |
| Compatible Controller |
MKS Type 153 / 1253D Valve Controller Series |
| Vacuum Application |
High Vacuum Process Systems |
| Flange Type |
Configuration dependent (KF / ISO / ASA options available) |
| Operating Environment |
Clean vacuum process environment |
| Dimensions |
Approx. industrial compact valve assembly size |
| Weight |
Approx. 3.24 kg |
| Power Requirement |
Supplied by compatible valve controller |
| Communication Interface |
Controller-based valve control interface |
| Discontinued |
Legacy semiconductor equipment component |
Q&A
Q: What is the main function of MKS 153D-26353?
A: It is a motorized throttle valve used to regulate vacuum exhaust flow and maintain stable chamber pressure during semiconductor manufacturing processes.
Q: Is 153D-26353 a pressure sensor or controller?
A: No. It is a vacuum flow control valve. It operates together with a compatible MKS valve controller to achieve automatic pressure regulation.
Q: Where is this valve commonly used?
A: It is commonly used in semiconductor fabrication equipment, vacuum coating systems, etching equipment, and other high-vacuum process systems.
Q: What are common failure symptoms?
A: Typical issues include slow valve response, incorrect chamber pressure control, position feedback errors, motor drive faults, contamination buildup, or communication problems with the controller.
Q: What should be checked before replacement?
A: Verify the complete part number, valve size, flange type, controller compatibility, vacuum system configuration, mechanical condition, and process requirements before installation.
Q: Does this valve require calibration after installation?
A: Yes. After replacement, valve position calibration and controller parameter verification may be required to ensure accurate vacuum pressure control.
